High precision testing method of mixed signal device

Recent advances in semiconductor production technology have enabled the on-chip configuration of integrated circuit systems. This has resulted in the increase of mixed signal LSIs that contain digital LSIs and analog LSIs, that have up till now been produced individually, being integrated on a single chip. When compared with individual digital and analog tests up till now, mixed signal LSIs pose the following problems for high-precision testing. High-precision measurement is difficult due to peripheral noise as analog signals are handled, and the reproducibility of measurement results is poor. This paper describes a method of testing sigma-delta D/A converters and LCD driver LSIs using an example where the above problems in a mixed signal LSI were solved. When conducting high-precision measurement of sigma-delta D/A converters with a mixed signal tester, measurement at the same precision as when a high-precision tester is used is possible when the influence of clock jitter, the influence of the power supply, the influence of peripheral circuits, and the dynamic range of the measurement system are taken into consideration. With respect to LCD driver LSIs, this paper describes testing problems and two inspection methods, the differential comparator system and the digitizer system.<>