Ferroelectric copolymer and IR sensor technology applied to obstacle detection

The design of an integrated sensing system including a silicon structure and a P(VDFO.7-TRFEO.3) copolymer is presented. The monolithic integrated sensor is based on a pyroelectric thermal P(VDF.7-TRFEO.3) copolymer detector, a polyimide microelectronic photoresist for thermal insulation, and a standard process silicon read-out circuit. Studies undertaken to realize the system are described. The ISL poling process is examined, and pyroelectric characteristics are presented. The intrinsic ferroelectric properties of the copolymer used are also given. As an application, a prototype infrared sensor giving a 32*32 copolymer focal plane array has been developed.<>