Distributed electrostatic micro actuator

A micro actuator that is called a distributed electrostatic actuator, because it consists of many driving units, and that is driven by electrostatic force is described. Each driving unit has wavelike electrodes, which are insulated and pull each other by the electrostatic force. The deformation of this actuator depends on the electrostatic force, the elasticity of the structure, and the external force. The motion of the actuator was analyzed with the finite-element method (FEM), and a macro model of the actuator was fabricated to verify its motion. It was confirmed that the actuator's apparent compliance can be controlled by a feedback control system using capacitive displacement sensing and electrostatic driving.<
>