Energy resolved emission microscopy

The assembly and test of a high-resolution photon emission microscopy system incorporating instrument response corrected spectroscopy of electroluminescence for IC failure analysis and reliability characterization are presented. The primary purpose of the system is to provide low-cost, high-resolution, high-sensitivity emission microscopy capability to a campus lab with a wide variety of users. However, recent investigations in the area of spectral analysis suggest that the instrument response corrected spectra generated by the system may be utilized in providing accurate estimations of hot carrier energy distributions and device lifetimes, as well as in providing consistent information concerning failure modes and mechanisms.<>