Configuration and management strategies for cluster-based fabs

New models of conventional and single-wafer, cluster-based fabs running 0.35 micron logic flows have been developed based almost entirely on existing equipment technology. The cluster-based fabs are an embodiment of an alternative approach to semiconductor manufacturing, which is referred to as adaptable manufacturing systems (ASMs). Relative to conventional fabs, AMSs seek to balance throughput time and cost requirements, rather than only focusing on cost reduction as the dominant objective. The models are used to contrast the major components of throughput time and cost in the different types of fabs. Next, the models are used to show that that the optimal fab configurations and management strategies of the AMSs change over the life cycle of the fab. Making these changes at key points in the fab's life cycle allow the AMS to be more responsive to changing market demands, compared to conventional fabs.<>