0.2 mu m T-shaped gate 2DEGFETs with an (InAs) (GaAs) short period superlattice channel on a GaAs substrate

(InAs)/sub 1/(GaAs)/sub n/ short-period superlattice (SPS) channel 2DEGFETs with 0.2 mu m T-shaped gates have been successfully fabricated, and DC and RF performances of the superlattice channel devices have been investigated. Compared to conventional InGaAs alloy channel devices, excellent results in both DC and RF characteristics have been obtained for the SPS channel devices. Higher cut-off frequencies and superior, noise performances of 0.55 dB with an associated gain of 11.26 dB at 12 GHz have been shown. The improved device performances can be explained based on superior electron transport due to the anisotropy of the effective mass of electrons in the SPS channel. These results indicate the great potential of SPS channel structures for high-frequency low-noise device applications.<>