Processing, electrical and microwave properties of sputtered Tl-Ca-Ba-Cu-O superconducting thin films

A reproducible fabrication process has been established for TlCaBaCuO thin films on LaAlO/sub 3/ substrates by RF magnetron sputtering and post-deposition processing methods. Electrical transport properties of the thin films were measured on patterned four-probe test devices. Microwave properties of the films were obtained from unloaded Q measurements of all-superconducting ring resonators. This paper describes the processing, electrical and microwave properties of Tl/sub 2/Ca/sub 1/Ba/sub 2/Cu/sub 2/O/sub x/ (2122) phase thin films.<>