BiCMOS process design for mixed-signal applications

Mixed-signal BiCMOS processes must provide for higher-voltage operation and diverse components to support a fragmented market. Most BiCMOS processes have evolved from an existing core 5V CMOS technology. The impact on process design of extending the voltage range and adding analog components is described. The ABCMOS-2 process, whose device cross-sections are shown, is used to illustrate the effects. Its major performance parameters are summarized, and components and future trends are considered.<>