A simple experimental technique for the measurement of the work of adhesion of microstructures

A method to measure the interfacial work of adhesion, gamma /sub s/, between undoped polysilicon beams and a silicon substrate is presented. The method relies on the peeling and detachment of polysilicon cantilever beams. Values of surface energy of gamma /sub s/=140+or-70 mJ m/sup -2/ were found for both hydrophilic and hydrophobic samples. The technique used should also be applicable to the measurement of gamma /sub s/ for other micromechanical material systems.<>