A device for ultrasound dosimetry based upon a PZT/Si composite

The authors discuss the development of a composite structure of lead zirconate-titanate (PZT) and silicon which can be used to measure the local intensity or total power associated with a complex acoustic field. In the composite structure, the interaction between the electric fields induced by an acoustic wave in the piezoelectric component couples to the charge carriers in the semiconductor component. It is possible to tailor the material properties and dimensions of the individual components to optimize the acousto-electric response.<>