Growth of Horizontally Aligned One-Dimensional Carbon Nanotubes Array on a Si Substrate

A one-dimensional (1-D) array of carbon nanotubes horizontally aligned on silicon substrates was successfully grown using a flame synthesis method based on the template of a one-dimensional anodic aluminum oxide nanopore array. The diameter and length of nanotubes are controlled by the geometry of nanopores of the aluminum oxide template. This one-dimensional carbon nanotube array may have great potential for fabrication of nanoelectronic devices and nano-electromechanic systems (NEMS) compatible with the planar processing technology.