Optical Properties, Elasto-Optical Effects, and Critical-Point Parameters of Biaxially Stressed Si1-yCy Alloys on Si

The optical properties (complex dielectric function) and critical-point parameters for Si_1-yC_y alloys with high substitutional C content grown pseudomorphically on Si (001) were determined. These data are useful for process control (if such alloys are used in CMOS processing), for example using spectroscopic ellipsometry to determine film thickness, modulation spectroscopy (especially photoreflectance) to determine composition and strain, for the correction of UV Raman spectroscopy data, or for the assessment of film quality by identifying intrinsic alloy disorder in perfect samples