Positioning characteristics of ultrasonic rotary actuator with two mode operation

A trial ultrasonic rotary actuator to be applied as a precision positioning controller is presented. Using the actuator, which consists of a longitudinal multilayered piezoelectric actuator (LMPA) and a torsional multilayered piezoelectric actuator (TMPA), the angular positioning characteristics were studied. The actuator is driven by two modes, that is, dynamic and static operations. Employing the two mode operations in a complementary manner, the angular positioning has been successfully proved to be quickly controlled with an excellent accuracy of 1 arcsec +or- 0.5 arcsec.<>