High Fill-Factor Paraboloidal Microlens Arrays

In this paper, we proposed a new fabrication method for a high fill-factor microlens arrays (MLA) with controllable paraboloidal profiles, based upon the 3-D diffuser lithography and additional flood exposure method. The proposed fabrication method of the MLA consists of three steps; formation of a high fill-factor photoresist mold using the 3-D diffuser lithography and MESD technology, fabrication of a copper intermediate mold and nickel master mold by electroplating, and plastic replication from the nickel master mold