Laser patterning of a-Si solar modules with transparent conducting zinc oxide back electrodes

A patterning process has been developed for a Nd:YAG picosecond pulse laser and for a frequency-doubled Nd:YLF nanosecond laser. Best results were achieved with a 10 ns laser pulse at a wavelength of 523 nm focused through the glass substrate. The authors obtained a whole-area efficiency of 9.8% for a 300*310 mm/sup 2/ pin-a-Si:H solar module. A tentative process model is given.<>