Implementation and analysis of microwave switch in CMOS-MEMS technology

The fabrication of a micro-machined microwave switch using the standard 0.35/spl mu/m CMOS process and the post-process by wet etching without extra mask is implemented in this work. The components of the microwave switch are coplanar waveguide (CPW) transmission lines, a suspended membrane and supported springs. Experimental results show that the driving voltage of the switch approximates to 17 V. The switch has an insertion loss of -1.5 /spl sim/ -2.5dB and an isolation of -5 /spl sim/ -15 dB between 30 /spl sim/ 50 GHz. Moreover, an equivalent circuit is proposed to analyse the performance of this switch.