Fabrication of an integrated spiral-type inductor dedicated to DC-DC microconverters

This paper describes the fabrication steps of a spiral-type inductor designed for power electronics conversion. Realized on silicon wafer and using photolithography and electroplating techniques, this microinductor is composed of a copper spiral conductor sandwiched between two iron-nickel laminated magnetic layers. Furthermore, specific devices have been realized in order to characterize the magnetic material.