Dynamic Elastic Bending in Optically Driven Microcantilever: Surface Strain Effects

Dynamic thermoelastic (TE) and electronic deformation (ED) bending in a bimaterial rectangular microcantilever are investigated. The theoretical model for the dynamic elastic vibrations of the microcantilever, including the surface stress effects (the axial force) is given. The components of elastic bending of microcantilever, with dimensions typical for atomic force microscopy are calculated. These investigations are important for many sensors and actuators based on microcantilevers