A Novel High Performance Micromechanical Resonant Electrostatic Field Sensor Used In Atmospheric Electric Field Detection

This paper reports a high performance micromechanical resonant electrostatic field sensor (EFS) that is fabricated with a three-layer polysilicon surface micromachining process. The EFS has a high resolution of 100V/m when used in ambient air at room temperature. The driving voltage is 25V DC and 0.3Vp-p AC lower than other reported electrostatic comb driven devices. Experimental results show that the EFS can be succeeded in atmospheric electric field detecting.