A 3-D.O.F. high precision mobile positioning microrobot

Using piezoelectric ceramic stacks (PZT) as micro driving elements, a 3-D.O.F high precision mobile positioning microrobot based on the inch-worm driving principle is designed in this paper. Kinematics and dynamics of the microrobot are all analyzed to enhance characteristics of the microrobot. Finite element method is also used to analyzed the flexible hinger to ensure the microrobot move and position better. In order to test characteristics of the designed microrobot, a microscope is used to measure the picture elements of the microrobot when in micro mobile positioning in the experiments. The experimental results prove the design is reasonable and practicable.