Mechanical behaviour of a 10g MEMS noncrossing differential capacitive accelerometer

A MEMS lateral capacitive accelerometer was designed and simulated. The accelerometer used in the study is based on gap-difference principle. It consists of 74 pairs of fingers and the proofmass suspended by two straight truss springs at both ends. Important parameters such as displacement, differential capacitance, harmonic response and sensitivity were studied and results presented. The shock resistance was also simulated to ensure the robustness of the device against external shock. The accelerometer is 40/spl mu/m thick and 0.6mm 0.7mm in size. It has a resonant frequency of 3.60 kHz at acceleration of 10g.