Characterisation of advanced multilayer de-embedding structures up to 50 GHz incorporating a novel validation standard

Modern multi-level metallisation schemes offer the possibility of many innovative structures for frequency characterisation and de-embedding. In this paper we perform a detailed characterisation of several such structures up to 50 GHz and show their application to measurements of a high performance HBT device. We further propose a consistency check, by comparing independent DC and s-parameter measurements, to gain further confidence in the de-embedding operations.