Design of millimeter-wave bandpass filters with /spl lambda//sub g//4 short stubs using GaAs surface micromachining

In this paper, millimeter-wave bandpass filters with /spl lambda//sub g//4 short stubs by surface micromachining on GaAs substrate are presented. This filter show flexible bandwidth with the variation of the position of the short stub using the external quality factor, Q/sub e/ without changing the impedance value at millimeter-wave range. The bandpass filters can be realized with wide (50 %) and narrow (10 %) bandwidth just by adjusting the position of the short stubs. They show the insertion losses of 2.3 dB and 6.8 dB, and the return losses of 15 dB and 16 dB at the center frequency 60 GHz, respectively.