Novel solid-state spatial light modulator on integrated circuits for high-speed application with electro-optic thin film

Novel solid-state spatial light modulator (SLM) is developed by using an electro-optic thin film technology. The use of sol-gel technique makes it possible to fabricate optically smooth 800nm-thick lead zirconate titanate (PZT) films. It shows large electro-optic effects Deltan=0.02 with the fastest switching response of 12ns that have ever been reported. The prototype 180times180 SLM array on 5mmtimes5mm-size chip demonstrates 2-dimensional displays with the three primary colors