Technology Advances in Batch Production of Pt-Doped TiO2 Sol-Gel Oxygen Sensor

Aim of this work is the evaluation of a batch production fabrication run of a cheap sol-gel Pt-doped TiO
₂
thin film sensor on silicon substrate. The sensor is implemented as microsensors for lambda factor detection, while a preliminary investigation on real operative conditions shows that these devices perform a response time (t
₉₀
) in real condition around 1 second at 600 degC. Experimental tests in comparison with a commercial lambda probe were carried out