Atto-liter periodical cavities for optical molecular detection

A process technology for fabrication of high quality nano-hole arrays in thin gold layers on glass substrates, suitable for biomolecular applications is presented. Making use of a bi-layer resist system, electron-beam lithography and a lift-off technique, different arrays of square-shaped nano-holes have been obtained. The holes dimensions are between 100nm and 200nm, with different lattice constants in each case. The arrays were furthermore optically characterized, showing uniformity and increased intensity of the out-coming light