2-D Low Energy Electron Beam Profile Measurement Based on Computer Tomography Algorithm with Multi-Wire Scanner

A new method for low energy electron beam profile measurement is advanced, which presents a full 2-D beam profile distribution other than the traditional 2-D beam profile distribution given by 1-D vertical and horizontal beam profiles. The method is based on the CT (Computer Tomography) algorithm. Multiple sets of 1-D beam profile projection data are obtained by rotating the multi-wire scanner. Then a 2-D beam profile is reconstructed from these projections with CT algorithm. The principle of this method is presented. An experimental setup was designed and the experimental results are analyzed in detail.