Design of a bulk acoustic wave coupled-resonator filter application in the WLAN band (5.15 - 5.35 GHz)

This paper presents the design of a bulk acoustic wave coupled-resonator filter (BAW-CRF) for application in the WLAN 802.11a European band (5.15 GHz 5.35 GHz). The presented design methodology allows retrieving the filter structure dimensions (layer thicknesses and electrode areas) based on the extraction of an equivalent network from Chebyshev expressions. The BAW CRF can be fabricated on top of silicon substrates. The designed filter consists in a very compact solution (180 /spl mu/m /spl times/ 115 /spl mu/m), having 2 dB of insertion loss and 48 dB of attenuation at the rejection band.