Miniaturized angular rate sensor with laminated quartz tuning fork

We have developed a small surface mount type angular rate sensor (5.0times3.2times1.3mm) with a miniaturized quartz tuning fork sensor element (3.7times0.94times0.24mm) which was manufactured from a laminated quartz wafers. The miniaturized new sensor indicated the following results. 1) Sensitivity : 0.64mV/deg/sec. 2) Zero point voltage : 1.47V. 3) Maximum angular velocity : +/- 180deg/sec