Resonance in a self-supported vacuum grating for tunable optical filters: theoretical approach

Resonance phenomena of a self-supported sub-wavelength grating are studied for tunable grating devices in optical MEMS. It was found recently that a self-supported grating works as a guided mode resonant grating. In this paper, the characteristics of the self-supported gratings are investigated theoretically and experimentally. It is shown that the self-supported grating works as both narrow and wide range filters with a high efficiency.