Micro-machining of several materials with the FHG of YAG laser beams

Micro-machining with laser beams is carried out in many fields such as micro-machine devices, chemistry, biochemistry, medical science etc.. Laser beams used in such fields are short-wave length and ultra-short pulse lasers. Laser system with short-wave length of the FHG of YAG laser is used in this research work. The wave length is 266 nm and the pulse duration is 6 ns. Beam quality is very important in micro-machining. Arbitrary shapes were machined using developed laser machining system