In situ temperature monitoring system for experimental investigation of microstructures

This paper presents a temperature monitoring system used for the experimental investigation and characterization of materials and microstructures or devices under different temperature conditions. After a general description of the measurement system, the temperature control and measurement block is presented. The heating and the sensing elements are firstly presented, and then the temperature monitoring unit is described. Besides the constructive solutions, problems related to thermal contact, calibration, error and sensitivity are also discussed.