Design of 1m/sup 2/ order single-layer slotted waveguide array for plasma excitation including the effect of vacuum window using the GSM-MoM analysis

A unit-cell of the array with vacuum window, except plasma and chamber, is analyzed by the GSM-MoM analysis and the array is designed for uniform aperture illumination. Uniform aperture illumination on the quartz glass strips is observed by the near field measurement using 1/5 scale model antenna, and validity of the analysis/design is confirmed. Aperture EM field distribution is measured by using 1/5 scale model antenna at 12.25GHz, and good uniformity is observed.