Circuit modeling of RF capacitive MEMS switch

The frequency and transient behaviours of electrostatically activated MEMS shunt switch networks are investigated. The frequency range 0-40 GHz is considered. A two-dimensional electro-mechanical model of the MEMS switch is solved by a numerical technique based on the finite element method (FEM) solution in a deforming computation domain. The MEMS equivalent electrical circuit is extracted by the FEM solution and is analyzed by a circuit CAD simulator. Transient voltages at the output port of the MEMS switch are computed for different electrogeometrical configurations.