Electric field enhancement caused by porosity in ultra-low-k dielectrics

It is demonstrated that the electric field distribution can be distinguishably enhanced by the presence of free volumes or pores in dielectrics. It is shown that the intensity of the electric field is dependent on the permittivity, shape and interconnectivity of the pores. This leads to the conclusion that inclusion of porosity in dielectrics can degrade the insulating property and enhance the dielectric breakdown mechanism.