FEM simulations to estimate the polymer thickness deposited over mechanical resonators

Measurements of polymer thicknesses deposited over resonant structures are difficult to carry out through optical or mechanical techniques. This paper proposes to estimate the equivalent thickness of the sensitive layer using FEM simulations. Resonant frequency before and after the polymer (PEUT or PDMS) has been sprayed showed that thicknesses varied between 0.1 /spl mu/m and 6.5 /spl mu/m.