Mechanical and electrical properties evaluation of carbon nanowire using electrostatic actuated nano tensile testing devices (EANAT)

This research develops electrostatic actuated nano tensile testing devices named EANAT to evaluate mechanical and electrical properties of carbon nanowire fabricated by focus ion beam assisted chemical vapor deposition (FIB-CVD). Carbon nano structures are one of promising nanomaterials used for NEMS. This research carried out nanoscale uniaxial tensile test and I-V characteristics measurement of 85 nm-diametric carbon nanowire using EANAT. Young's modulus of carbon nanowires averaged 80 GPa, which is close to reported values of ultra-thin diamond-like carbon films. The tensile strength of nanowires was also 6 GPa in average. The electrical resistivity is about 0.015 /spl Omega/m.