Application of OIM to studies of Cu(In,Ga)Se/sub 2/ thin films

Previous work by the author has shown the feasibility of orientation imaging microscopy (OIM) in the microstructural study of Cu(In,Ga)Se/sub 2/ thin-films (CIGS). OIM is an automated electron backscatter diffraction technique which is nondestructive and can be used to quickly and easily determine the grain size and structure of a material. The current work compares grain size measurements made with transmission and scanning electron microscopy (TEM, SEM) as compared to OIM. Misorientation data for a polycrystalline CIGS sample is also demonstrated.