Preparation and characterization of Mn-Ir/Fe-Si exchange-coupled multilayer film with Ru underlayer for high-frequency micromagnetic devices

In this work, Ru underlayer effect on magnetic properties of Fe-Si layers in Mn-Ir/Fe-Si exchange-coupled multilayer film is investigated. To distinguish magnetic characterization of each Fe-Si layer in the multilayer film from M-H curve observed in easy axis, each Fe-Si layer with different exchange bias field H/sub ex/ is fabricated. Results show that when using Ru underlayer for the multilayer film, each Mn-Ir/Fe-Si interface is flat. Also, the anisotropy dispersion and coercivity of the multilayer film becomes small when using Ru underlayer.