Patteming of biomolecules on silicon by AFM oxidation

Patterning of biomolecules on solid surfaces has been extensively investigated [ 1] in relation to fabrication of biosensors. In recent years, there is also an emerging interest in the development of DNA chips and protein chips, in which biomolecules are integrated on the surface at high densities. Various approaches have been already proposed for patterning of biomolecules. For example, micro-contact printing is a high-throughput and low-cost technique. Submicron patterning of protein is achieved by AFM lithography and dip-pen nanolithography [2].