Film bulk acoustic resonator at 4.4 GHz with ultra low temperature coefficient of resonant frequency

This paper describes a temperature compensated film bulk acoustic resonator (FBAR) with temperature coefficient of resonant frequency (TCF) of -0.45 ppm//spl deg/C (between 85 and 110/spl deg/C) at 4.4 GHz. The FBAR is composed of Al/ZnO/Al/SiO/sub 2/ on a surface micromachined cantilever that is released by XeF/sub 2/ vapor etching. Residual stress and material temperature parameters have been incorporated into simulations for optimal design of a temperature compensated FBAR.