MOVPE growth of 980nm VCSEL using optical in-situ techniques

A 980 nm VCSEL was grown by LP-MOVPE. In-situ monitoring was carried out through reflectance measurements during the growth. Based on high quality material growth, a 980 nm VCSEL was also fabricated and tested. An output light power of 7.1 mW, lasing wavelength of 974 nm and slope efficiency of 0.462 mW/mA were obtained under CW conditions.