X-ray lithography fabrication of large diffractive optical elements on a curve surface

We demonstrate experimentally the X-ray lithography technique to fabricate diffractive optical elements (DOE) on curved surfaces such as convex and concave lens (mirrors) with moving resist stage driven by a step motor. Some gratings with different pitches on the convex and concave lens surface are obtained. We believed that this technique can also transfer large area DOE patterns, with a continuous surface relief, onto a convex and concave lens (mirrors) surface.