Time-resolved diagnostics in a pulsed, electron beam-generated plasma

Time-resolved ion flux and energy distributions were measured at an electrode located adjacent to a pulsed, electron beam-generated plasma produced in argon. A Langmuir probe was also used to determine time-dependent electron temperature and plasma density. Temporal variations in the incident Ar/sup +/ and Ar/sup +2/ ion energy and flux were correlated to changes in the electron temperature and plasma density. The evolution of the plasma density and ion flux is understood by considering the loss mechanisms of each ion species.