Three-dimensional remarkable images of low-pressure H/sub 2/ ICP in E-mode

Computerized tomography (CT), in association with optical emission spectroscopy (OES), is used to investigate the three-dimensional image of radio frequency inductively coupled plasma (RF-ICP) in low-pressure hydrogen in E-mode. As a series of CT studies in this paper, we demonstrate a distinct image in H/sub 2/ ICP in the E-mode, i.e., the presence of two independent plasmas in a low-pressure region.