A magnetically driven PDMS peristaltic micropump

We present a robust low-cost PDMS peristaltic micropump with magnetic drive. The fabrication process is based on the soft molding and bonding of three PDMS layers. A base layer incorporates the microchannel while a middle layer contains the actuation membrane. The top layer encapsulates three small permanent magnetic rods (Ni-plated-NdFeB) in three small chambers. A small DC motor (6 mm in diameter and 15 mm in length) with three permanent magnets stagger-mounted on its shaft is used to pull down and actuate the membrane-mounted magnets to generate a peristaltic waveform. A maximum pumping rate of about 24 /spl mu/L/min at the speed of 1700 rpm with power consumption of 11 mW was demonstrated. A preliminary numerical analysis of the peristaltic pump was performed, which showed the characteristic membrane deflection and fluid flow of pumping.