Optical metrology aimed for process quality-control-loops (QCL) in production-modules for micro-technology

A tendency for micro-systems production, which has been followed worldwide during the last years, consists in the miniaturization not only of the manufactured parts but also of the production equipments and specially the machine tools. Among many benefits, this reduction in size allows modular production, which fits well with the product-variety of microsystems. In order to strength the flexibility' character of modular production, an adaptive system for inspection and quality control is needed. The goal of the research to be reported in this document is focused on the design, construction and implementation of an optical measuring device conceived as a modular and universal system for quality control and the integration of such a system into miniaturized production frameworks (microfactory) for micro-technology in order to create a complete process quality control loop.