Damping effect on precise track following for nano-motion actuator

We have introduced a nanometer positioning actuator with a high servo bandwidth for a conventional spin-stand. The actuator was required a large working distance over 10 /spl mu/m and a high resonance frequency for a positioning resolution less than 0.5 nm. As the previously designed actuator had a high peak amplitude, the servo bandwidth was restricted to a low frequency range. A new damping mechanism was introduced to the nanometer positioning actuator. Since the damping mechanism reduces the resonance peak of amplitude down to 2.5% of the original, the servo bandwidth can be expanded to fifteen times as large as that of the damperless system. The actuator with the damping mechanism is effective to improve servo-tracking performance of the spin-stand.