The application of micro-mechanics on MEMS design

One of important part on MEMS designing is to analyze mechanical behavior of the material under the microdimension and meso-dimension .This paper obtain a method of developing material's geometry models as well as mechanical models in micro-dimension, according to crystal lattice theory and lattice kinetics theory .This paper use the method to analyze a microaccelerometer deformation under 1O5g acceleration load, and the result shows feasibility of this method.