Response of an annular electrostatic probe for a planar dielectric spacer: II

The response of annular electrostatic probes mounted in an electrode is examined with reference to a planar dielectric spacer. On this occasion, the presence of a high-voltage point electrode is included in the system geometry. The study involves using the probe /spl lambda/ function to derive characteristic parameters. These parameters enable the response of such probes to be quantitatively assessed.